The goal of this project is to popularize of Mode Superposition based Reduced Order Modeling technique for MEMS simulations.
Kolchuzhin, Vladimir and Mehner, Jan (2015, June 30). System level modeling of the micromirror cell. Zenodo. 10.5281/zenodo.19153
coming soon ...
Simulink model of the micromirror cell:
- micromirror_ini.m
- sene.m
- cap12.m
- cap13.m
- cap23.m
- micromirror.mdl (in progress)
https://github.com/Kolchuzhin/micromirror_cell_in_VHDL-AMS/blob/master/Simulink_model/readme.md
- 2D layout of the micromiror cell in an SVG format.
- The CAD geometry of the micromiror cell in an IGES format.
The vhd-files have been compiled with hAMSter simulation system Version 2.0:
- variant 1: "Original Model" with comments + testbench.vhd;
- variant 2: micromirror.vhd (single file w/o packages);
- variant 3: micromirror.vhd (w/o SIGNAL) in progress;
Testbench:
- Solver parameters: Euler solver, time=1.5m, step=0.5 us
- Load options:
- use_pass=0 => external modal forces, uN; fm1_ext=km_1*q1_ext, => q1_ext=1.0 (mechanical test)
- use_pass=1 => calculation of voltage displacement functions up to pull-in: voltage sweep
- use_pass=2 => calculation of voltage displacement functions at multiple load steps
- use_pass=3 => calculation of displacements at acting element loads
- use_pass=4 => (prestressed) harmonic analysis -> chirp for harmonic response; + DFT (external)
- use_pass=5 => nonlinear transient analysis
Original Model of micromirror cell generated by ANSYS ROM Tool:
- initial.vhd
- ca12_ams_130.vhd
- ca13_ams_130.vhd
- ca23_ams_130.vhd
- s_ams_130.vhd
- transducer.vhd