- with ANSYS(R) FEM-program for
- UNIX (DEC-Ultrix, HP-UX) workstations
- and PC-486 (MS-DOS) personal computers
- MEMS-sensors based on silicon resonators with piezoelectric thin-film layers (AlN, ZnO)
- and etched quartz crystals (DETF: Double-Ended Tuning Fork)
- bimorph structures (silicon & PZT ceramic)
- piezoelectric simulation of MEMS sensors & actuators
- silicon resonators & actuators (beams, diaphragms, cantilever, etc.)
- with ZnO & AlN piezoelectric thin-film layers for excitation & detection
- hybrid bimorph Si bimorph-structures with PZT ceramics (PoC)
- triple-beam force sensors based on silicon / ZnO thin films
- HF-etched quartz crystals with Au electrodes
- use of different quartz cuts
- Double-Ended-Tuning-Fork (DETF)
lead zirconium titanate, commonly abbreviated as PZT:
- PZT (Pb[Zr(x)Ti(1-x)]O3), one of the world’s most widely used piezoelectric ceramic materials
- here: Siemens VIBRIT420 (Data sheet 1981), SIEMENS Piezokeramik PZT
- Datenblatt VIBRIT®, Piezoelectric Ceramics from Siemens, Redwitz
- VIBRIT - Piezoceramics from Siemens, Ord.-No.: N-281/5035-101
- https://en.wikipedia.org/wiki/Lead_zirconate_titanate
- https://katalog.slub-dresden.de/id/0-016158210
- https://tfconsult.com/entwurf-und-auslegung-mikromechanischer-strukturen/
- https://tfconsult.com/fe-modellierung-resonanter-sensoren/
- https://tfconsult.com/berechnung-von-quarz-kraftsensoren/
- https://tfconsult.com/piezoelectric-micro-actuators/
- https://tfconsult.com/piezoelectrical-driven-force-sensor/
- https://tfconsult.com/fe-modeling-of-resonant-sensors/
- https://tfconsult.com/microsystems-modeling/
- https://tfconsult.com/tag/piezo/
- https://tfconsult.com/tag/quarz/
- https://tfconsult.com/tag/zno/
- https://tfconsult.com/tag/pzt/
... to be continued !