Litho Simulation, to implement lithography model and algorithm described in textbooks or papers.
- Objectives in Near future:
- Providing capabiltiy of Parsing GDSII file, also adding notes or instructions on GDSii format ---- Parse GDS file to ASCii (done) ---- Parse boundry type of GDS file to mask ---- ....
Build Mask by polygons
Foward simulation of Lithography process
- Source of Models and Algorithms:
- Optical and Other Models:
Fundermental of Lithography, Chris Mack
Resolution Enhancement Techniques in Optical Lithography, Alfred Wong