What is aldFoam

aldFoam is a package to solve the reactive transport under self-limited processes such as Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE). aldFoam comprises a number of solvers and boundary conditions. aldFoam is built on top of OpenFOAM, a C++ toolbox to solve partial differential equations using finite volume methods.

Disclaimer

What you are seeing here is a pre-released version of aldFoam. The first public release will happen in late July 2020.

Install instructions

In order to install aldFoam you need to have OpenFOAM installed in your system. From github:

git clone https://github.com/anglyan/aldFoam.git
cd aldFoam
cd firstorder
wmake
cd ..
cd dose
wmake
cd ..
cd aldFoam
wmake

This gives you a basic installer to simulate the reactive transport of a single ALD or ALE precursor.

Authors

aldFoam was developed at Argonne National Laboratory. The following scientist have been involved in the project:

Angel Yanguas-Gil, ayg@anl.gov, Lead and founder.
Jeffrey W Elam

Copyright and license

aldFoam is distributed under the terms of the GPLv3 license. A copy of the license is included in this distribution.