Error wiht extracting [rename] after running catkin_make

[spq686]

Libs already extracted
Building target static
-- extracting... [analysis]
[ 19%] Built target cvg_sim_msgs_generate_messages_lisp
-- extracting... [rename]
[ 25%] Built target rosapi_generate_messages_py
[ 31%] Built target rosapi_generate_messages_cpp
CMake Error at thirdparty-stamp/extract-thirdparty.cmake:50 (file):
file RENAME failed to rename

/home/quynh/catkin_ws/build/thirdparty/src/ex-thirdparty1242/thirdparty

to

/home/quynh/catkin_ws/build/thirdparty/src/thirdparty

because: Directory not empty

make[2]: *** [thirdparty/src/thirdparty-stamp/thirdparty-download] Error 1
make[1]: *** [tum_ardrone/CMakeFiles/thirdparty.dir/all] Error 2
make[1]: *** Waiting for unfinished jobs....
[ 37%] Built target rosapi_generate_messages_lisp
[ 42%] Architecture x86_64 is already built
Creating universal static lib file from architectures x86_64
Built target rosbridge_library_generate_messages_py
Build done.
Checking required Ubuntu packages ...
ok.
Building ARDroneTool/Lib
Building ARDroneTool/Lib
[ 43%] Performing install step for 'ardronelib'
make[3]: warning: jobserver unavailable: using -j1. Add `+' to parent make rule.
[ 43%] Completed 'ardronelib'
[ 44%] Built target ardronelib
make: *** [all] Error 2
Invoking "make -j4 -l4" failed