Include pixel-based mask synthesis, imaging model for optical lithography in Python. This is a simplified package, maybe OUT-OF-DATE.
#USAGE:
- These files base on PIL, Numpy, Sci, pyFFTW packages. GDSii package is already included
- It can be run directly or included as a lib
- Just run this test.py for inverse mask synthesis application
- The NanGateLibGDS was accessed in (http://projects.si2.org/openeda.si2.org/projects/nangatelib)
#NOTE:
- This package only contains files applied for scalar optics, thin mask model assumption
- Image Equations refer to A.K.Wong's book
- Process Equations refer to C.Mack's book
- Opimization Equations can be found in the paper: [1] Wen Lv, Shiyuan Liu, Xiaofei Wu, and Edmund Y. Lam, “Illumination source optimization in optical lithography via derivative-free optimization,” JOSAA 31(12): B19-B26 (2014). [2] Wen Lv, Edmund Y. Lam, Haiqing Wei, and Shiyuan Liu, “Cascadic multigrid algorithm for robust inverse mask synthesis in optical lithography,” JM3 13(2): 023003 (2014). [3] Wen Lv, Qi Xia, and Shiyuan Liu, “Mask-filtering-based inverse lithography,” JM3 12(4): 043003 (2013). [4] Wen Lv, Shiyuan Liu, Qi Xia, Xiaofei Wu, Yijiang Shen, and Edmund Y. Lam, “Level-set-based inverse lithography for mask synthesis using the conjugate gradient and an optimal time step,” JVSTB 31(4): 041605(2013).
#Primary Modual: ******* Mask *******
- You can just run the mask.py file
- Basd on the GDSii Python Packages (BY Eugeniy Meshcheryakov), slightly modified. It can convert to a pixel image from GDSII
- The method openGDS file works well with the test GDS file in folder NanGateLibGDS, but it does not be verified for others
******* Lens *******
- You can just run the lens.py file
******* Source *******
******* Image *******
******* ILT *******