/array_lithography

Utilities for performing parallel and simultaneous lithography using an array of self-heating AFM cantilevers

Primary LanguageIGOR ProGNU General Public License v3.0GPL-3.0

Trigger Utilities for Parallel SPM Lithography

  • Each cantilever in the array is assigned a separate / unique pattern to draw.
  • Since the cantilevers do not have the ability to move independently, we need to be able to "turn-on" and "off" the writing for each cantilever in real-time automatically according to it's assigned pattern
  • This utility enables said capability.

Journal papers that used / were generated using this software

  1. Somnath, Suhas, Hoe Joon Kim, Huan Hu, and William P. King. "Parallel nanoimaging and nanolithography using a heated microcantilever array." Nanotechnology 25, no. 1 (2013): 014001.